First, electrostatic attraction Electrostatic adsorption

We know that the integrated circuit production process needs clean workshops or ultra-clean workshops. However, few manufacturers in China do not have particles in their clean rooms. It is now required that the particle size of the dust particles be reduced from the current 0.3m to 0.1m. However, if the particle size of the adsorbed dust is larger than the line width, it is easy to scrap the product.

Sometimes customers will ask, we do a good job in the whole process of wafer production electrostatic protection, grounding are well connected, the need for anti-static equipment are used, the purification level is also very high. Why does it absorb dust after leaving for a period of time? This is because the machines or workshops that produce and process wafers are equipped with FFU high efficiency filters. When the airflow rubs the product, static electricity is generated, and when the static electricity accumulates to a certain amount, dust will be absorbed. Therefore, we recommend that a static eliminator without air source be installed at the lower end of the high efficiency filter to ensure the dynamic balance of the entire space.

2. Electrostatic discharge

Electrostatic discharge is a process of charge accumulation. When the charge accumulates to a certain extent, electrostatic discharge occurs when the conductor is close. To take a very simple example, in the dry winter, people can easily accumulate static electricity after rubbing nearby. When we touch a metal handle or open a car door, we feel an electric shock, which is electrostatic discharge. When the general human body has 3000-5000 volts of static electricity, it will feel obvious discharge.

The same is true of semiconductor components. If a semiconductor device with a certain amount of static electricity is placed separately or placed in a circuit module, it will immediately fail. After the device is affected by electrostatic discharge, the functional damage may not occur immediately, but the reliability of the component may be affected.

Electrostatic discharge costs can amount to billions of dollars per year. As a result, many large component and equipment manufacturers introduce expertise to reduce the accumulation of static electricity in the production environment.